Low-g Area-changed MEMS Accelerometer Using Bulk Silicon Technique
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: American Journal of Applied Sciences
سال: 2008
ISSN: 1546-9239
DOI: 10.3844/ajassp.2008.626.632